Patents
Patent data provided by The
European Patent Office
and updated through early 2009. Full text patent data loaded weekly coming soon.
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USRE38900 (E1), filed
Mar 19, 1999
, published
Nov 29, 2005
- LSI LOGIC CORP
Automated photolithography of integrated circuit wafers is enabled with a processor connected to a Rayleigh derator, a form factor generator, a logic synthesizer, a layout generator, a lithography module and a wafer process. The Rayleigh derator receives...
USRE37913 (E1), filed
Apr 12, 2000
, published
Nov 26, 2002
- NIPPON KOGAKU KK
A projection exposure apparatus carries out scan exposure with illumination flux of slit(s) by moving a mask and a substrate in a direction of one-dimension at synchronized speeds with each other. The mask is inclined with a predetermined angle relative to the...
USRE38126 (E1), filed
Jan 06, 2000
, published
May 27, 2003
- TEXAS INSTRUMENTS INC
An improved reticle (20) and method of using it to expose layers of wafers for large integrated circuits (10). The integrated circuit (10) is designed so that nonrepeating patterns are laid out in perimeter areas, distinct from the center area containing...
US1709320 (A), filed
(unknown)
, published
(unknown)
- POWERS PHOTO ENGRAVING COMPANY
US2780957 (A), filed
(unknown)
, published
(unknown)
- OCTAVE LIBAULT ANDRE CHARLES
US2878739 (A), filed
(unknown)
, published
(unknown)
- ROGERS MURRAY K
US3249436 (A), filed
(unknown)
, published
(unknown)
- DU PONT
US3508826 (A), filed
(unknown)
, published
Apr 28, 1970
- NORTH AMERICAN ROCKWELL
US3575588 (A), filed
(unknown)
, published
Apr 20, 1971
- IBM
US3573456 (A), filed
(unknown)
, published
Apr 06, 1971
- OPTO MECHANISMS INC
US3705769 (A), filed
Nov 12, 1970
, published
Dec 12, 1972
- JOHANNSMEIER KARL HEINZ
A semiconductor wafer is loaded onto a pivotally-mounted portion of a chuck assembly and held in place by application of a vacuum to the lower surface of the wafer. The chuck assembly is then driven upward under fluid pressure to position the upper surface of...
US3704945 (A), filed
May 05, 1971
, published
Dec 05, 1972
- COMPUTERVISION CORP
A mechanism for precisely determining the location coordinates of the photographic film sheet carried by a removable cassette mounted on the movable bed of a photoplotting machine. The cassette has registration pins which engage the prepunched film. The...
US3704946 (A), filed
(unknown)
, published
Dec 05, 1972
- OPT OMECHANISMS INC
A machine to generate the art work in making photomasks for microcircuits. A photoplate is mounted on a precision X and Y coordinate table underneath a microflash camera having a master reticle holder holding a master reticle plate. The master plate has a...
